Enhancing the Ibis i2000™ SIMOX Oxygen Ion Implanter
By: C. McKenna, R. Dolan, J. Blake, S. Richards

Improved Techniques for Characterization and Optimization of SIMOX Implantation
By: R. Dolan, C. McKenna, S. Richards, Y. Aoki, T. Nakai, S. Nakamura, M. Walden

Measurement Characteristics
for Functional Layers of SIMOX
and Current Topics
By: SUMITOMO MITSUBISHI SILICON COPR.

The Ibis i2000 SIMOX Ion Implanter
By: J. Blake & Steve Richards, IIT2002

300 mm Ultra-Thin
Advantox MLD SIMOX Wafers Manufactured Using i2000 Implanter
By: J. Blake, et al, SOI Conference 2002

Introduction to SIMOX Technology
By: Dr. Julian Blake, Encyclopedia of Science & Technology