Click hereEnhancing the Ibis i2000™ SIMOX Oxygen Ion Implanter
By: C. McKenna, R. Dolan, J. Blake, S. Richards

Click hereImproved Techniques for Characterization and Optimization of SIMOX Implantation
By: R. Dolan, C. McKenna, S. Richards, Y. Aoki, T. Nakai, S. Nakamura, M. Walden

Click hereMeasurement Characteristics
for Functional Layers of SIMOX
and Current Topics

By: SUMITOMO MITSUBISHI SILICON COPR.

Click hereThe Ibis i2000 SIMOX Ion Implanter
By: J. Blake & Steve Richards, IIT2002

Click here300 mm Ultra-Thin
Advantox MLD SIMOX Wafers Manufactured Using i2000 Implanter

By: J. Blake, et al, SOI Conference 2002

Click hereIntroduction to SIMOX Technology
By: Dr. Julian Blake, Encyclopedia of Science & Technology

SIMOX-SOI

Overview
Advantages
Applications
Technical Papers

 

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