A beam of oxygen ions as they
exit the
ion source and travel through the analyzer
magnet which bends their path.
Oxygen implanters perform the primary process involved in the manufacture of all SIMOX-SOI wafers, and Ibis is the world's leading provider of oxygen implanters.
The Ibis i2000 oxygen ion implanter is a high-throughput,
high-volume production tool for manufacturing
300-millimeter SIMOX-SOI wafers.
Front of i2000 implanter showing
operator interface and load ports. A cassette of 300-mm wafers is seen in the foreground.
Implanter Products
Overview
